✦ LIBER ✦
Depth profiling of Co/Ti – silicide films using total reflection X-ray fluorescence (TXRF) spectrometry combined with low energy ion beam etching (IBE) for sample preparation
✍ Scribed by W. Frank; A. Schindler; H.-J. Thomas
- Book ID
- 105897305
- Publisher
- Springer
- Year
- 1998
- Tongue
- English
- Weight
- 81 KB
- Volume
- 361
- Category
- Article
- ISSN
- 1618-2650
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