Orientation and growth behavior of CaHfO3 thin films on non-oxide substrates
β Scribed by Y.W. Kwon; D.P. Norton; John D. Budai
- Book ID
- 113790713
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 326 KB
- Volume
- 61
- Category
- Article
- ISSN
- 0167-577X
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A sol-gel Pb 0.76 Ca 0.24 TiO 3 solution was deposited by spin-coating onto Pt/Ti/SiO 2 /Si(100), Ti/Pt/Ti/SiO 2 / Si(100) and Pt/TiO 2 /SiO 2 /Si(100) substrates. As-prepared substrates and those subjected to a thermal treatment in air at 650 Β°C for 1800 s were used. The wet films were dried at 350
The growth and characterization of zirconium oxide (ZrO 2 ) thin films prepared by thermal oxidation of a deposited Zr metal layer on SiO 2 /Si were investigated. Uniform ZrO 2 thin film with smooth surface morphology was obtained. The thermal ZrO 2 films showed a polycrystalline structure. The diel