Oriented growth of sol-gel-modified PbTiO3 thin films on Si-based substrates

✍ Scribed by Gonz�lez, A.; Poyato, R.; Jim�nez, R.; Mendiola, J.; Pardo, L.; Calzada, M. L.

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 136 KB
• Volume: 29
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/(sici)1096-9918(200005)29:5<325::aid-sia873>3.0.co;2-b

✦ Synopsis

A sol-gel Pb 0.76 Ca 0.24 TiO 3 solution was deposited by spin-coating onto Pt/Ti/SiO 2 /Si(100), Ti/Pt/Ti/SiO 2 / Si(100) and Pt/TiO 2 /SiO 2 /Si(100) substrates. As-prepared substrates and those subjected to a thermal treatment in air at 650 °C for 1800 s were used. The wet films were dried at 350 °C for 60 s and crystallized in air by rapid thermal processing (RTP) at 650 °C for 50 s, with a heating rate of ~30 °C s -1 . This procedure was repeated four times to obtain crystalline films with a thickness of ~250-300 nm. Perovskite films with different textures were obtained after crystallization. This texture was a consequence of the multilayer structure of the substrate. The formation of Pb 0.76 Ca 0.24 TiO 3 films with a preferred orientation in the 111 direction of the perovskite was observed when Ti was present at the top surface of the Pt. Texture of the films was studied by x-ray diffraction (XRD) and the structure of the substrate surfaces was studied by grazing incidence x-ray diffraction (GIXRD). Spontaneous pyroelectric coefficients were measured in the films.