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Reflection X-ray topography of ZnO thin films on non-orienting substrates

✍ Scribed by A. Misuik

Publisher: Elsevier Science
Year: 1981
Tongue: English
Weight: 485 KB
Volume: 76
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(81)90069-9

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## Abstract ZnO thin films doped with Li (ZnO:Li) were deposited onto SiO~2~/Si (100) substrates by direct‐current sputtering technique in the temperature range from room temperature to 500 °C. The crystalline structure, surface morphology and composition, and optical reflectivity of the deposited