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Characterization of thin Al2O3 films on InP substrates by X-ray topography

✍ Scribed by P. Franzosi; M. Scaffardi; M. Meliga; F. Taiariol; S. Tamagno

Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 274 KB
Volume: 148
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(87)90329-4

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