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MOCVD and Physicochemical Characterization of (HfO2)x(Al2O3)1-x Thin Films

✍ Scribed by Tamara P. Smirnova; Mikhail S. Lebedev; Natalia B. Morozova; Peter P. Semyannikov; Ksenia V. Zherikova; Vasily V. Kaichev; Yurii V. Dubinin

Publisher: John Wiley and Sons
Year: 2010
Tongue: English
Weight: 490 KB
Volume: 16
Category: Article
ISSN: 0948-1907
DOI: 10.1002/cvde.201006840

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