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Growth mechanism of orientated PLZT thin films sputtered on glass substrate

✍ Scribed by Zhang Ruitao; Ge Min; Luo Weigen

Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
123 KB
Volume
42
Category
Article
ISSN
0042-207X

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A sol-gel Pb 0.76 Ca 0.24 TiO 3 solution was deposited by spin-coating onto Pt/Ti/SiO 2 /Si(100), Ti/Pt/Ti/SiO 2 / Si(100) and Pt/TiO 2 /SiO 2 /Si(100) substrates. As-prepared substrates and those subjected to a thermal treatment in air at 650 Β°C for 1800 s were used. The wet films were dried at 350