✦ LIBER ✦

Organic contamination of silicon wafers by buffered oxide etching

✍ Scribed by M. Beyer; K. Budde; W. Holzapfel

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Metal and organic contamination effects

✍ G. Borionetti; P. Geranzani; R. Orizio; P. Godio; F. Bonoli; F. Pagani; C. Pello 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 237 KB

Detection of Silicon Wafer Contamination

✍ Salnick, A. ;Mandels, A. ;Jean, C. 📂 Article 📅 1997 🏛 John Wiley and Sons 🌐 English ⚖ 90 KB

Quantitative analysis of surface contami

✍ P. Rostam-Khani; J. Philipsen; E. Jansen; H. Eberhard; P. Vullings 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 253 KB

Local characterization of ultrathin oxid

✍ A.L. Vasquez de Parga; C. Ocal; J.E. Ortega; R. Miranda 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 423 KB

High aspect ratio silicon pillars fabric

✍ H.W Lau; G.J Parker; R Greef 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 661 KB

Characterization of thin oxide-n itride

✍ Weidner, M. ;Röseler, A. 📂 Article 📅 1992 🏛 John Wiley and Sons 🌐 English ⚖ 474 KB