Detection of Silicon Wafer Contamination by Lifetime Measurement Using Infrared Photothermal Radiometry

✍ Scribed by Salnick, A. ;Mandels, A. ;Jean, C.

• Publisher: John Wiley and Sons
• Year: 1997
• Tongue: English
• Weight: 90 KB
• Volume: 163
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/1521-396x(199709)163:1<r5::aid-pssa99995>3.0.co;2-0