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Metal and organic contamination effects on the characteristics of thin oxides thermally grown on silicon based wafers

✍ Scribed by G. Borionetti; P. Geranzani; R. Orizio; P. Godio; F. Bonoli; F. Pagani; C. Pello’


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
237 KB
Volume
253
Category
Article
ISSN
0168-583X

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