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Optimization of Titanium Nitride Rapid Thermal CVD Process

✍ Scribed by H. de Baynast; A. Bouteville; J.-C. Remy

Publisher: John Wiley and Sons
Year: 2000
Tongue: English
Weight: 330 KB
Volume: 6
Category: Article
ISSN: 0948-1907
DOI: 10.1002/(sici)1521-3862(200006)6:3<115::aid-cvde115>3.0.co;2-g

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