✦ LIBER ✦

Vapor Pressures of Precursors for the CVD of Titanium Nitride and Tin Oxide

✍ Scribed by A. M. B. van Mol; J. P. A. M. Driessen; J. L. Linden; M. H. J. M. de Croon; C. I. M. A. Spee; J. C. Schouten

Publisher: John Wiley and Sons
Year: 2001
Tongue: English
Weight: 314 KB
Volume: 7
Category: Article
ISSN: 0948-1907
DOI: 10.1002/1521-3862(200105)7:3<101::aid-cvde101>3.0.co;2-z

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Promising new precursors for the CVD of

Promising new precursors for the CVD of gold

✍ Frank Jansen; Prof. Thomas Kruck 📂 Article 📅 1995 🏛 John Wiley and Sons 🌐 English ⚖ 473 KB 👁 2 views

The Preparation of Titanium-Based Thin F

The Preparation of Titanium-Based Thin Film by CVD Using Titanium Chlorides as Precursors

✍ Chi-Young Lee 📂 Article 📅 1999 🏛 John Wiley and Sons 🌐 English ⚖ 457 KB 👁 1 views

Anhydrous Metal Nitrates as Volatile Sin

Anhydrous Metal Nitrates as Volatile Single Source Precursors for the CVD of Metal Oxide Films

✍ Daniel G. Colombo; David C. Gilmer; Victor G. Young Jr.; Stephen A. Campbell; Wa 📂 Article 📅 1998 🏛 John Wiley and Sons 🌐 English ⚖ 171 KB 👁 1 views

Time-Resolved In-Situ Spectroscopic Moni

Time-Resolved In-Situ Spectroscopic Monitoring of the CVD of Tin Oxide onto a Glass Substrate

✍ R. J. Holdsworth; P. A. Martin; D. Raisbeck; J. Rivero; H. E. Sanders; D. Sheel; 📂 Article 📅 2001 🏛 John Wiley and Sons 🌐 English ⚖ 335 KB 👁 1 views

Gas Phase Vibrations as a Tool for the C

Gas Phase Vibrations as a Tool for the Characterization of CVD Precursors and Processes

✍ G. A. Battiston; R. Gerbasi 📂 Article 📅 2001 🏛 John Wiley and Sons 🌐 English ⚖ 330 KB 👁 1 views

Cyclopentadienyl Germanes as Novel Precu

Cyclopentadienyl Germanes as Novel Precursors for the CVD of Thin Germanium Films

✍ K. Dittmar; P. Jutzi; J. Schmalhorst; G. Reiss 📂 Article 📅 2001 🏛 John Wiley and Sons 🌐 English ⚖ 255 KB 👁 1 views