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Irreversible Kinetics in CVD: A Reinterpretation of Titanium Nitride and Tungsten Formation

✍ Scribed by P. J. van der Put; J. A. M. Ammerlaan; J.-P. Dekker; J. Schoonman

Publisher: John Wiley and Sons
Year: 1999
Tongue: English
Weight: 387 KB
Volume: 5
Category: Article
ISSN: 0948-1907
DOI: 10.1002/(sici)1521-3862(199910)5:5<211::aid-cvde211>3.0.co;2-p

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