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Formation of Transition Metal Nitrides by Rapid Thermal Processing (RTP)

✍ Scribed by Galesic, I. ;Angelkort, C. ;Lewalter, H. ;Berendes, A. ;Kolbesen, B.O.

Publisher: John Wiley and Sons
Year: 2000
Tongue: English
Weight: 340 KB
Volume: 177
Category: Article
ISSN: 0031-8965
DOI: 10.1002/(sici)1521-396x(200001)177:1<15::aid-pssa15>3.0.co;2-d

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