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Optimization of material structure of ploy-Si thin film based on Al induced crystallization

✍ Scribed by ZeWen Wang; Bing Xiong; LiChong Zhang; Yi Luo

Book ID
107356425
Publisher
SP Science China Press
Year
2009
Tongue
English
Weight
687 KB
Volume
52
Category
Article
ISSN
1006-9321

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## Abstract Comparative structural analyses of a crystallized, 60 nm thick silicon film deposited on quartz substrate were performed using high resolution transmission electron microscopy (HRTEM) and Raman spectroscopy (RS). Both methods suggest high degree of crystallization of the film. The mater