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Microwave irradiation induced structural evolution of a-Si:H thin film before crystallization

✍ Scribed by He, Jian; Li, Wei; Xue, Wei-dong; Guo, An-ran; Wang, Chong; Jiang, Ya-Dong

Book ID
120173659
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
695 KB
Volume
100
Category
Article
ISSN
0167-577X

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πŸ“œ SIMILAR VOLUMES

Microwave-induced low-temperature crysta
Microwave-induced low-temperature crystallization of amorphous Si thin films
✍ Jin Hyung Ahn; Jeong No Lee; Yoon Chang Kim; Byung Tae Ahn πŸ“‚ Article πŸ“… 2002 πŸ› Elsevier Science 🌐 English βš– 158 KB

Microwave heating was utilized for low-temperature crystallization of amorphous Si (a-Si) films. Microwave heating lowered the annealing temperature and reduced the annealing time. By microwave heating the hydrogen in the amorphous films was diffused out long before the nucleation of polycrystalline