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Optimisation of furnace oxidation of Si with respect to negative bias stress instability

✍ Scribed by V. Nayar; R. Jackson; M.L. Filleul; K.M. Brunson; M.J. Uren; A.M. Hodge


Book ID
103599010
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
336 KB
Volume
22
Category
Article
ISSN
0167-9317

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