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Optical properties of diamond films deposited by low temperature microwave plasma CVD from camphor

✍ Scribed by S Kar; S Chaudhuri

Book ID
116730534
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
290 KB
Volume
58
Category
Article
ISSN
0167-577X

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## Abstract Nanocrystalline diamond (NCD) films were grown by microwave plasma CVD in hydrogen‐based gas mixture. Deposition experiments were performed at different temperatures varying from 370 to 1100 Β°C. Before growth step, silicon (100) oriented substrates were nucleated by bias enhanced nuclea