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Structural and optical characterization of thick and thin polycrystalline diamond films deposited by microwave plasma activated CVD

โœ Scribed by S K PRADHAN; B SATPATI; B P BAG; T SHARDA

Book ID
113093830
Publisher
Springer-Verlag
Year
2012
Tongue
English
Weight
313 KB
Volume
35
Category
Article
ISSN
0250-4707

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Structural and mechanical characterizati
Structural and mechanical characterization of diamond like carbon films grown by microwave plasma CVD
โœ Sambita Sahoo; Swati S. Pradhan; Venkateswarlu Bhavanasi; S.K. Pradhan ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 899 KB

Diamond like carbon (DLC) films is useful for tribology, optical and biocompatible coating applications. Plasma-activated processes such as radio frequency (RF) plasma CVD and electron cyclotron resonance (ECR) microwave (MW) plasma CVD are usually used to grow DLC films. By using a bowl shaped stee