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Low temperature limits of diamond film growth by microwave plasma-assisted CVD

✍ Scribed by Stiegler, J.; Lang, T.; Nyga˚rd-Ferguson, M.; von Kaenel, Y.; Blank, E.

Book ID: 121381180
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 940 KB
Volume: 5
Category: Article
ISSN: 0925-9635
DOI: 10.1016/0925-9635(95)00349-5

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