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Growth of diamond thin films by ECR plasma-assisted CVD at low pressures and temperatures

✍ Scribed by Jin, Shu; Moustakas, T.D.

Book ID: 121385960
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 865 KB
Volume: 2
Category: Article
ISSN: 0925-9635
DOI: 10.1016/0925-9635(93)90184-4

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