𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Study of diamond films grown at low temperatures and pressures by ECR-assisted CVD

✍ Scribed by Gupta, S; Morell, G; Katiyar, R.S; Gilbert, D.R; Singh, R.K


Book ID
121386016
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
213 KB
Volume
8
Category
Article
ISSN
0925-9635

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Growth of nanocrystalline diamond films
✍ Potocky, S. ;Kromka, A. ;Potmesil, J. ;Remes, Z. ;Polackova, Z. ;Vanecek, M. πŸ“‚ Article πŸ“… 2006 πŸ› John Wiley and Sons 🌐 English βš– 346 KB

## Abstract Nanocrystalline diamond (NCD) films were grown by microwave plasma CVD in hydrogen‐based gas mixture. Deposition experiments were performed at different temperatures varying from 370 to 1100 Β°C. Before growth step, silicon (100) oriented substrates were nucleated by bias enhanced nuclea