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Optical in situ measurements of temperature and layer thickness in Si molecular beam epitaxy

✍ Scribed by Myeongcheol Kim; H.J. Thieme; G. Lippert; H.J. Osten

Book ID: 108342226
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 533 KB
Volume: 169
Category: Article
ISSN: 0022-0248
DOI: 10.1016/s0022-0248(96)00478-2

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