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Carrier activation in in situ Si-doped GaAs layers fabricated by a focused Si ion beam and molecular beam epitaxy combined system

✍ Scribed by Takuo Hada; Hirotaka Miyamoto; Junichi Yanagisawa; Fujio Wakaya; Yoshihiko Yuba; Kenji Gamo


Book ID
114164480
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
102 KB
Volume
175-177
Category
Article
ISSN
0168-583X

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## Ε½ . A thin Si-doped layer was fabricated over a laterally selected area on a molecular beam epitaxy MBE -grown GaAs Ε½ . surface by 200 eV or 30 keV Si focused ion beam FIB implantation and successive overlayer regrowth using an FIBrMBE Ε½ . combined system. Characteristics of the buried doped la