Carrier profiles and electron traps at a
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T. Goto; T. Hada; J. Yanagisawa; F. Wakaya; Y. Yuba; K. Gamo
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Article
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2000
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Elsevier Science
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English
β 146 KB
## Ε½ . A thin Si-doped layer was fabricated over a laterally selected area on a molecular beam epitaxy MBE -grown GaAs Ε½ . surface by 200 eV or 30 keV Si focused ion beam FIB implantation and successive overlayer regrowth using an FIBrMBE Ε½ . combined system. Characteristics of the buried doped la