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Optical constants of thin CoSi2films on silicon

✍ Scribed by M. Wölfel; M. Schulz; J. Ionally; P. J. Grunthaner


Publisher
Springer
Year
1990
Tongue
English
Weight
380 KB
Volume
50
Category
Article
ISSN
1432-0630

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Thin films of CoSi2 on Si1−yCy substrate
✍ S. Teichert; M. Falke; H. Giesler; D.K. Sarkar; G. Beddies; H.-J. Hinneberg; G. 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 58 KB

The reaction of Co with epitaxial Si C (001) films is investigated with regard to dependence on annealing temperature 12y y and C concentration y. Resistance measurements and RBS analysis reveal a small increase in the disilicide formation temperature. The electrical properties are very similar for