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Influence of thickness inhomogeneity on the determination of optical constants of amorphous silicon thin films

✍ Scribed by T. Pisarkiewicz; A. Czapla; H. Czternastek


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
230 KB
Volume
65-66
Category
Article
ISSN
0169-4332

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A study of optical absorption in amorpho
✍ J. MΓΌllerovΓ‘; L. PruΕ‘Γ‘kovΓ‘; M. NetrvalovΓ‘; V. VavruňkovΓ‘; P. Ε utta πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 295 KB

We report results obtained from optical absorption studies carried out on amorphous silicon thin films deposited by plasma-enhanced chemical vapour deposition (PECVD) from silane plasma. The influence of the film thickness was studied on the two series of samples deposited from undiluted silane and