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Effect of zirconium addition on formation of CoSi2thin films

✍ Scribed by Fanxiong Cheng; Chuanhai Jiang; Xianping Dong; Haifeng Wu; Jiansheng Wu


Publisher
Springer
Year
2005
Tongue
English
Weight
966 KB
Volume
40
Category
Article
ISSN
0022-2461

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Thin films of CoSi2 on Si1βˆ’yCy substrate
✍ S. Teichert; M. Falke; H. Giesler; D.K. Sarkar; G. Beddies; H.-J. Hinneberg; G. πŸ“‚ Article πŸ“… 2000 πŸ› Elsevier Science 🌐 English βš– 58 KB

The reaction of Co with epitaxial Si C (001) films is investigated with regard to dependence on annealing temperature 12y y and C concentration y. Resistance measurements and RBS analysis reveal a small increase in the disilicide formation temperature. The electrical properties are very similar for