The formation of epitaxial CoSi2 thin films on (001) Si from amorphous Co-W alloys

✍ Scribed by A.H. Reader; J.P.W.B. Duchateau; J.E. Crombeen; E.P. Naburgh; M.A.J. Somers

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 922 KB
• Volume: 53
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(91)90248-i