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Optical and structural properties of SiC layers grown by an electron cyclotron resonance CVD technique

✍ Scribed by Giorgis, F; Chiodoni, A; Cicero, G; Ferrero, S; Mandracci, P; Barucca, G; Reitano, R; Musumeci, P

Book ID: 122354133
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 142 KB
Volume: 10
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(00)00528-8

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