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Optical and structural properties of nitrogen doped amorphous carbon films grown by rf plasma-enhanced CVD

โœ Scribed by Hayashi, Y.; Krishna, K.M.; Ebisu, H.; Soga, T.; Umeno, M.; Jimbo, T.


Book ID
122040324
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
140 KB
Volume
10
Category
Article
ISSN
0925-9635

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