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Optical and electrical properties of a-C:H deposited by magnetic confinement of r.f. PECVD plasma

โœ Scribed by Tomozeiu, N; Hart, A; Kleinsorge, B; Milne, W.I

Book ID
121885601
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
185 KB
Volume
8
Category
Article
ISSN
0925-9635

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