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Optical absorption of a-SiNx:H films prepared by RF glow-discharge

✍ Scribed by H. Watanabe; K. Katoh; M. Yasui; Y. Shibata

Book ID: 118332433
Publisher: Elsevier Science
Year: 1983
Tongue: English
Weight: 189 KB
Volume: 59-60
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(83)90656-7

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