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On the role of laminate architecture in thin films synthesized by ion beam assisted deposition

โœ Scribed by X. Wang; A. Kolitsch; A. Mueklich; F. Prokert; W. Moeller


Book ID
110241291
Publisher
Springer
Year
2000
Tongue
English
Weight
458 KB
Volume
19
Category
Article
ISSN
0261-8028

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Effect of the deposition rate on ITO thi
โœ Meng, Li-Jian ;Teixeira, V. ;dos Santos, M. P. ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 507 KB

## Abstract Indium tin oxide (ITO) thin films have been deposited onto glass substrates at room temperature by ion beam assisted deposition technique at different deposition rates (0.1โ€“0.3โ€‰nm/s). The effects of the deposition rate on the structural, optical and electrical properties of the deposite