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On the fluence dependence of the sputtering yield for low-energy noble gas ions

✍ Scribed by J. Kirschner; H. W. Etzkorn

Publisher: Springer
Year: 1982
Tongue: English
Weight: 729 KB
Volume: 29
Category: Article
ISSN: 1432-0630
DOI: 10.1007/bf00617769

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