Experiments on the Angular Dependence of the Ion Energy Reflection Coefficient at Low Energies

✍ Scribed by B. Koch; W. Bohmeyer; G. Fussmann; K. Matyash; R. Schneider

• Publisher: John Wiley and Sons
• Year: 2006
• Tongue: English
• Weight: 213 KB
• Volume: 46
• Category: Article
• ISSN: 0005-8025
• DOI: 10.1002/ctpp.200610018

✦ Synopsis

Abstract

In this paper we present a method of deriving the ion energy reflection coefficient R ~E~ from simultaneous measurements of the current‐ and energy flux density as functions of the bias voltage applied. R ~E~ is measured as a function of the angle in a low temperature magnetized plasma. The measurements were performed for different ion gyro radii covering the whole angular range between normal and grazing incidence. The values thus obtained for R ~E~ are in the range 0.2 to 0.4. They are below theoretical values calculated using the TRIM code. In case of small ion gyro radii r ~i~, a strong angular dependence of R ~E~ is observed which does not occur for large r ~i~. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)