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Measurement of the sputtering yield for Ar+ and Ar2+ ions on gold films

✍ Scribed by R.K. Fitch; E.A. Mahmoud

Publisher: Elsevier Science
Year: 1982
Tongue: English
Weight: 227 KB
Volume: 87
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(82)90291-7

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