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Dependence of energy per molecule on sputtering yields with reactive gas cluster ions

✍ Scribed by Noriaki Toyoda; Isao Yamada

Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 348 KB
Volume: 268
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2010.06.022

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