𝔖 Bobbio Scriptorium

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On the existence of point defects in physical vapor deposited films of TiN, ZrN, and HfN: A J Perry, J Vac Sci Technol, A6, 1988, 2140–2148

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 309 KB
Volume: 39
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(89)90386-2

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