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7448. The state of residual stress in TiN films made by physical vapor deposition methods; the state of the art: A J Perry, J Vac Sci Technol, A8, 1990, 1351–1358


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
161 KB
Volume
42
Category
Article
ISSN
0042-207X

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