7159. A further study of the state of residual stress in TiN films made by physical vapor deposition methods: AJ Perry, J Vac Sci Technol, A8, 1990, 3186–3193

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 149 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)90966-m