Factors affecting the formation of misor
Factors affecting the formation of misoriented domains in 6H-SiC single crystals grown by PVT method
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T. H. Peng; H. Yang; J. K. Jian; W. J. Wang; W. Y. Wang; X. L. Chen
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Article
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2009
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John Wiley and Sons
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English
⚖ 160 KB
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## Abstract Misoriented domains (MDs) are common defects in 6H‐SiC single crystals. We performed an experimental study on the formation of MDs in 2‐inch 6H‐SiC single crystals. Micro‐Raman spectroscopy revealed that the polytype of MDs was mainly 4H‐SiC. By changing growth conditions, it was found