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Evolution and structure of low-angle grain boundaries in 6H–SiC single crystals grown by sublimation method

✍ Scribed by Yuqiang Gao; Xiaobo Hu; Xiufang Chen; Xiangang Xu; Yan Peng; Sheng Song; Minhua Jiang


Book ID
108166109
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
1018 KB
Volume
312
Category
Article
ISSN
0022-0248

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## Abstract Misoriented domains (MDs) are common defects in 6H‐SiC single crystals. We performed an experimental study on the formation of MDs in 2‐inch 6H‐SiC single crystals. Micro‐Raman spectroscopy revealed that the polytype of MDs was mainly 4H‐SiC. By changing growth conditions, it was found