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Growth of 2 Inches 6H-SiC Single Crystals by Sublimation Method: The Comparison of α- and ß-SiC Powders

✍ Scribed by Seo, Soo Hyung; Song, Joon Suk; Oh, Myung Hwan; Wang, Yen Zen

Book ID: 121242747
Publisher: Trans Tech Publications, Ltd.
Year: 2005
Tongue: English
Weight: 409 KB
Volume: 483-485
Category: Article
ISSN: 1662-9752
DOI: 10.4028/www.scientific.net/MSF.483-485.17

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## Abstract Misoriented domains (MDs) are common defects in 6H‐SiC single crystals. We performed an experimental study on the formation of MDs in 2‐inch 6H‐SiC single crystals. Micro‐Raman spectroscopy revealed that the polytype of MDs was mainly 4H‐SiC. By changing growth conditions, it was found