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Observation of Thermal-Annealing Evolution of Defects in Ion-Implanted 4H-SiC by Luminsescence

✍ Scribed by Freitas, Jaime A.; Jones, Kenneth A.; Derenge, Michael A.; Vispute, R.D.; Hullavarad, Shiva S.

Book ID: 120484992
Publisher: Trans Tech Publications, Ltd.
Year: 2006
Tongue: English
Weight: 409 KB
Volume: 527-529
Category: Article
ISSN: 1662-9752
DOI: 10.4028/www.scientific.net/MSF.527-529.847

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