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Observation of an enhanced gettering effect in silicon under germanium molecular ion implantation

✍ Scribed by C. David; B. Sundaravel; T.R. Ravindran; K.G.M. Nair; B.K. Panigrahi; H.P. Lenka; B. Joseph; D.P. Mahapatra

Book ID: 106020550
Publisher: Springer
Year: 2007
Tongue: English
Weight: 205 KB
Volume: 88
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s00339-007-3996-7

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