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O2 cluster ion-assisted deposition for tin-doped indium oxide films

✍ Scribed by Jiro Matsuo; Hiroshi Katsumata; Eiji Minami; Isao Yamada

Book ID: 114171927
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 286 KB
Volume: 161-163
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(99)00901-5

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