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Indium oxide film formation by O2 cluster ion-assisted deposition

✍ Scribed by Wei Qin; Ronald Philip Howson; Makoto Akizuki; Jiro Matsuo; Gikan Takaoka; Isao Yamada

Book ID: 114194422
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 424 KB
Volume: 54
Category: Article
ISSN: 0254-0584
DOI: 10.1016/s0254-0584(98)00109-6

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