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Stable optical thin film deposition with O2 cluster ion beam assisted deposition

✍ Scribed by N. Toyoda; Y. Fujiwara; I. Yamada

Book ID: 114167213
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 186 KB
Volume: 206
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(03)00882-6

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