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Hard DLC film formation by gas cluster ion beam assisted deposition

✍ Scribed by Teruyuki Kitagawa; Isao Yamada; Noriaki Toyoda; Harushige Tsubakino; Jiro Matsuo; G.H. Takaoka; Allen Kirkpatrick

Book ID
114166446
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
132 KB
Volume
201
Category
Article
ISSN
0168-583X

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πŸ“œ SIMILAR VOLUMES

Fluoride thin film formation with low op
Fluoride thin film formation with low optical absorption by gas cluster ion beam assisted deposition
✍ S. Nakazawa; N. Toyoda; K. Mochiji; T. Mitamura; I. Yamada πŸ“‚ Article πŸ“… 2007 πŸ› Elsevier Science 🌐 English βš– 491 KB

Gas cluster ion beam (GCIB) shows characteristics of low-energy irradiation effect and dense energy deposition. GCIB-assisted deposition is expected to be used for high-quality fluoride film formation, although these films are sensitive to damage by ion irradiation. In this study, LaF 3 and MgF 2 fi