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NEXAFS study on substrate temperature dependence of DLC films formed by Ar cluster ion beam assisted deposition

✍ Scribed by K. Kanda; Y. Shimizugawa; Y. Haruyama; I. Yamada; S. Matsui; T. Kitagawa; H. Tsubakino; T. Gejo

Book ID: 114167219
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 89 KB
Volume: 206
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(03)00888-7

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